Patent Leaderboard
USPTO Patent Rankings Data through Dec 31, 2025
Home › Substrate storage container management system, load port, and substrate storage container management method

Substrate storage container management system, load port, and substrate storage container management method

US Patent 11662373 · Granted May 30, 2023

Assignee

Inventors

View full patent text on Google Patents →

More Patents by These Inventors

Exhaust nozzle unit, load port, and EFEM2023
Transfer abnormality detection system and transfer abnormality detection method2022
Transfer abnormality detection system and transfer abnormality detection method2022
Substrate storage container management system, load port, and substrate storage 2021
Substrate storage container management system, load port, and substrate storage 2021
Projector and control method for projector2018
Light emitting diode with a light source suitable structure2013
Light emitting diode with supporting substrate side electrodes and wiring struct2013