Semiconductor device and manufacturing method thereof

Assignee

• Semiconductor Energy Laboratory

Inventors

• Tetsuhiro Tanaka (133 patents)
• Mitsuhiro Ichijo (91 patents)
• Toshiya Endo (38 patents)
• Akihisa Shimomura (187 patents)
• Yuji Egi (48 patents)
• Sachiaki Tezuka (44 patents)
• Shunpei Yamazaki (6,629 patents)

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