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Home › Piezo-resistive transistor based resonator with anti-ferroelectric gate dielectric

Piezo-resistive transistor based resonator with anti-ferroelectric gate dielectric

US Patent 11646356 · Granted May 9, 2023

Estimated economic value: $19,706,000 ⓘ

Assignee

Intel

Inventors

Tanay Gosavi (152 patents)
Chia-Ching Lin (124 patents)
Raseong Kim (16 patents)
Ashish Verma Penumatcha (38 patents)
Uygar E. Avci (127 patents)
Ian A. Young (265 patents)

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