Method for manufacturing sputtering target, method for forming oxide film, and transistor

Assignee

• Semiconductor Energy Laboratory

Inventors

• Shunpei Yamazaki (6,629 patents)
• Masashi TSUBUKU (247 patents)
• Masashi Oota (53 patents)
• Yoichi KUROSAWA (10 patents)
• Noritaka Ishihara (48 patents)

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