Wafer inspection method and wafer

Assignee

• Hamamatsu Photonics K.K.

Inventors

• Yumi Kuramoto (24 patents)
• Katsumi Shibayama (260 patents)
• Takashi Kasahara (104 patents)
• Masaki Hirose (136 patents)
• Toshimitsu Kawai (58 patents)
• Hiroki Oyama (78 patents)

View full patent text on Google Patents →