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Home › High-speed wavelength-scale spatial light modulators with two- dimensional tunable microcavity arrays

High-speed wavelength-scale spatial light modulators with two- dimensional tunable microcavity arrays

US Patent 11614643 · Granted Mar 28, 2023

Assignee

MIT

Inventors

Cheng Peng (9 patents)
Christopher Louis Panuski (6 patents)
Ryan HAMERLY (5 patents)
Dirk Robert Englund (84 patents)

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