Patent Leaderboard
USPTO Patent Rankings Data through Dec 31, 2025
Home › Piezoelectric MEMS actuator for compensating unwanted movements and manufacturing process thereof

Piezoelectric MEMS actuator for compensating unwanted movements and manufacturing process thereof

US Patent 11614634 · Granted Mar 28, 2023

Estimated economic value: $44,062,000 ⓘ

Assignee

Inventors

View full patent text on Google Patents →

More Patents by These Inventors

PMUT array with presence of separate sensing small PZT on membranes edge2025
Packaged pressure sensor device and corresponding method for detecting the prese2025
Microfluidic device for spraying small drops of liquids2025
Packaged electronic system formed by electrically connected and galvanically iso2025
Transducer assembly with buried cavities and method of manufacturing the same2025
Microfluidic dispenser device for delivering inhalable substances2025
Piezoelectric micromachined ultrasonic transducer comprising a lobed membrane el2025
Process for manufacturing a thin-film piezoelectric microelectromechanical struc2025
Piezoelectric micromachined ultrasonic transducer having a polymeric member over2025
Mems actuator and manufacturing process thereof2025
Piezoelectric mems device with a suspended membrane having high mechanical shock2024
MEMS optical device comprising a lens and an actuator for controlling the curvat2024