Assignee
- Semiconductor Manufacturing International (Beijing)
- Semiconductor Manufacturing International (Shanghai)
Inventors
- Hansu OH (3 patents)
- Pengchong Li (5 patents)
- Xuejie Shi (6 patents)
- Yiyu L. Chen (23 patents)
- Bo SU (25 patents)
US Patent 11605726 · Granted Mar 14, 2023