Assignee
- Semiconductor Manufacturing International (Shanghai)
- Semiconductor Manufacturing International (Beijing)
Inventors
- Yi-Chun Lu (23 patents)
- Xiaohui Zhuang (2 patents)
- Yihui Lin (5 patents)
- Liang-Wei Wang (31 patents)
- Le Li (89 patents)
- Kaige Gao (1 patents)
- Wenjie Zhu (30 patents)
- Jialin Zhao (22 patents)