Patent Leaderboard
USPTO Patent Rankings Data through Dec 31, 2025
Home › Arc suppression device for plasma processing equipment

Arc suppression device for plasma processing equipment

US Patent 11574799 · Granted Feb 7, 2023

Assignee

Inventors

View full patent text on Google Patents →

More Patents by These Inventors

Retuning for impedance matching network control2025
Variable reactance device having isolated gate drive power supplies2025
Method for repeatable stepper motor homing2024
Plasma generation systems with multi-dimensional impedance matching networks2024
Electromagnetic field sensing device2024
Coaxial variable capacitor2024
Variable capacitor with linear impedance and high voltage breakdown2024
Method and system for plasma processing arc suppression2024
Systems and methods for variable gain tuning of matching networks2024
Hybrid matching network topology2024
Dielectric fluid variable capacitor2023
Hybrid matching network topology2023