Apparatus for treating semiconductor process gas and method of treating semiconductor process gas

Assignee

• Samsung

Inventors

• Suji Gim (7 patents)
• Sunwoo Yook (3 patents)
• Youngduk Ko (2 patents)
• Youngseok Roh (3 patents)
• Seoyoung Maeng (7 patents)
• Jongyong Bae (7 patents)
• Jihnkoo Lee (3 patents)
• Jungjoon Pyeon (3 patents)
• Jongha Hwang (2 patents)

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