Patent Leaderboard
USPTO Patent Rankings Data through Dec 31, 2025
Home › Jig for attaching and detaching cleaning member

Jig for attaching and detaching cleaning member

US Patent 11524322 · Granted Dec 13, 2022

Estimated economic value: $8,590,000 ⓘ

Assignee

Inventors

View full patent text on Google Patents →

More Patents by These Inventors

Substrate cleaning apparatus, polishing apparatus, buffing apparatus, substrate 2025
Substrate drying device and substrate drying method2025
Cleaning apparatus and polishing apparatus2025
Substrate cleaning apparatus and cleaning method of substrate2024
Cleaning module, substrate processing apparatus including cleaning module, and c2024
Cleaning apparatus and polishing apparatus2024
Cleaning member mounting mechanism and substrate cleaning apparatus2024
Washing device and washing method2023
Substrate holding and rotation mechanism and substrate processing apparatus2023
Substrate cleaning method and substrate cleaning apparatus2023
Roller shaft for substrate cleaning2023
Substrate cleaning apparatus, substrate cleaning method, substrate processing ap2023