Atomic-scale e-beam sculptor

Assignee

• Ut-Battelle

Inventors

• Sergei V. Kalinin (23 patents)
• Stephen Jesse (16 patents)
• Albina Y. Borisevich (3 patents)
• Ondrej E. Dyck (2 patents)
• Bobby G. Sumpter (4 patents)
• Raymond R. Unocic (6 patents)

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