Assignee
- Semiconductor Manufacturing International (Shanghai)
- Semiconductor Manufacturing International (Beijing)
Inventors
- Ruizhi Tang (4 patents)
- Jinyu Fu (1 patents)
- Lin Liu (49 patents)
- Bo Li (11 patents)
- Peng Yang (45 patents)
- Haojun Huang (2 patents)
- Jialei Liu (4 patents)