Patent Leaderboard
USPTO Patent Rankings Data through Dec 31, 2025
Home › Hard mask and hard mask forming method

Hard mask and hard mask forming method

US Patent 11469106 · Granted Oct 11, 2022

Assignee

Inventors

View full patent text on Google Patents →

More Patents by These Inventors

Substrate processing method and apparatus2024
Sputtering apparatus2024
Apparatus and method for performing sputtering process2023
Sputtering apparatus and film forming method2023
Sputtering apparatus and sputtering method2023
Film-forming apparatus, film-forming system, and film-forming method2023
Methods to reshape spacer profiles in self-aligned multiple patterning2023
Film forming apparatus and film forming method2022
Film formation device and film formation method2022
Film forming apparatus and method2022
Film-forming device2022
Film-forming device2022