Patent Leaderboard
USPTO Patent Rankings Data through Dec 31, 2025
Home › Substrate container, controller, and abnormality detection method

Substrate container, controller, and abnormality detection method

US Patent 11462444 · Granted Oct 4, 2022

Assignee

Inventors

View full patent text on Google Patents →

More Patents by These Inventors

Processing method in processing apparatus using halogen-based gas2021
Processing method and processing apparatus of metal member2021
Particle generation preventing method and vacuum apparatus2020
Cleaning method of processing apparatus, program for performing the method, and 2017
Internal member of a plasma processing vessel2014
Cleaning substrate and cleaning method2014
Particle sticking prevention apparatus and plasma processing apparatus2013
Substrate processing system, substrate surface processing apparatus, substrate s2013
Particle number measurement method2013
Internal member of a plasma processing vessel2013
Method for cleaning elements in vacuum chamber and apparatus for processing subs2012
Particle removal apparatus and method and plasma processing apparatus2012