Patent Leaderboard
USPTO Patent Rankings Data through Dec 31, 2025
Home › Ceramic structure for plasma processing apparatus and manufacturing method thereof

Ceramic structure for plasma processing apparatus and manufacturing method thereof

US Patent 11456158 · Granted Sep 27, 2022

Assignee

Inventors

View full patent text on Google Patents →

More Patents by These Inventors

Ceramic susceptor and manufacturing method thereof2025
Ceramic heater2025
Memory device and method for calibrating the device and fabricating the device2024
Memory device, host device and method of operating the memory device2024
N-(isopropyl-triazolyl)pyridinyl)-heteroaryl-carboxamide derivatives and use the2024
Ceramic heater2024
Ceramic heater2024
Ceramic heater2024
Stop seal for application of high temperature and high pressure2024
Electronic device, server and recording medium supporting task execution using e2023
Method for operating an Internet-of-Things system2023
Electrostatic chuck2022