Patent Leaderboard
USPTO Patent Rankings Data through Dec 31, 2025
Home › Position metrology apparatus and associated optical elements

Position metrology apparatus and associated optical elements

US Patent 11428925 · Granted Aug 30, 2022

Estimated economic value: $42,848,000 ⓘ

Assignee

Inventors

View full patent text on Google Patents →

More Patents by These Inventors

Metrology systems, coherence scrambler illumination sources and methods thereof2025
Product lifecycle management of data migration during a system update2025
Inspection apparatus and inspection method2025
Illumination apparatus and associated metrology and lithographic apparatuses2025
Illumination apparatus and associated metrology and lithographic apparatuses2025
Monolithic particle inspection device2025
Lithographic apparatus, metrology systems, and methods thereof2025
Inspection method and apparatus, lithographic apparatus, lithographic processing2025
Methods and systems for predicting account-level risk scores of cardholders2025
Generating multiple internet protocol (IP) addresses in wireless network2024
Metrology method and lithographic apparatuses2024
Phishing mail generator with adaptive complexity using generative adversarial ne2024