Thin-film filter, thin-film filter substrate, method of manufacturing the thin-film filter, method of manufacturing the thin-film filter substrate, MEMS microphone and method of manufacturing the MEMS microphone

Assignee

• Sae Magnetics (H.K.)

Inventors

• Hiroshi Take (52 patents)
• Masashi Shiraishi (156 patents)
• Toyotaka Kobayashi (5 patents)
• Makoto Yoshida (365 patents)
• Anthony Reymund Melad Binarao (14 patents)
• Cheng Bu Heng (13 patents)

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