Assignee
- Semiconductor Manufacturing International (Shanghai)
- Semiconductor Manufacturing International (Beijing)
Inventors
- Lianfeng Hu (1 patents)
- Youcun Hu (6 patents)
- Ming-Chuan Yang (19 patents)
- Duohui Bei (10 patents)
- Baibing Ni (1 patents)
US Patent 11424318 · Granted Aug 23, 2022