Assignee
- Semiconductor Manufacturing International (Shanghai)
- Semiconductor Manufacturing International (Beijing)
Inventors
- Zhu Chen (34 patents)
- He Zuopeng (2 patents)
- Yang Ming (9 patents)
- Yao Dalin (1 patents)
- Bei Duohui (4 patents)
US Patent 11404273 · Granted Aug 2, 2022