Assignee
- Semiconductor Manufacturing International (Shanghai)
- Semiconductor Manufacturing International (Beijing)
Inventors
- Hao Zhang (482 patents)
- Xuezhen JING (6 patents)
- Jingjing Tan (7 patents)
- Tiantian Zhang (27 patents)
- Zhangru Xiao (5 patents)
- Zengsheng XU (2 patents)