Assignee
- Semiconductor Manufacturing International (Shanghai)
- Semiconductor Manufacturing International (Beijing)
Inventors
- Bo SU (25 patents)
- Shiliang JI (8 patents)
- Erhu Zheng (8 patents)
- Yan Wang (17 patents)
- Haiyang Zhang (97 patents)
US Patent 11393685 · Granted Jul 19, 2022