Patent Leaderboard
USPTO Patent Rankings Data through Dec 31, 2025
Home › Beamsplitter based ellipsometer focusing system

Beamsplitter based ellipsometer focusing system

US Patent 11385167 · Granted Jul 12, 2022

Assignee

Inventors

View full patent text on Google Patents →

More Patents by These Inventors

Bandgap measurements of patterned film stacks using spectroscopic metrology2023
Bandgap measurements of patterned film stacks using spectroscopic metrology2022
Vortex polarimeter2022
Focus system for oblique optical metrology device2022
Metrology system calibration refinement2020
Metrology system calibration refinement2018