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Home › Hydrophobic pinning mat for directed self-assembly of diblock copolymer novel compositions and processes for self-assembly of block copolymers

Hydrophobic pinning mat for directed self-assembly of diblock copolymer novel compositions and processes for self-assembly of block copolymers

US Patent 11384193 · Granted Jul 12, 2022

Estimated economic value: $416,219,000 ⓘ

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