Patent Leaderboard
USPTO Patent Rankings Data through Dec 31, 2025
Home › Manifolds for uniform vapor deposition

Manifolds for uniform vapor deposition

US Patent 11377737 · Granted Jul 5, 2022

Assignee

Inventors

View full patent text on Google Patents →

More Patents by These Inventors

Showerhead assembly and components thereof2025
Manifolds for uniform vapor deposition2025
Refillable large volume solid precursor sublimation vessel2025
Constant headspace ampoule2025
Bottom fed sublimation bed for high saturation efficiency in semiconductor appli2024
Semiconductor processing apparatus and a method for processing a substrate2024
Ampoule for a semiconductor manufacturing precursor2024
Apparatus, system, and method for generating gas for use in a process chamber2023
Bottom fed sublimation bed for high saturation efficiency in semiconductor appli2023
Bottom fed sublimation bed for high saturation efficiency in semiconductor appli2023
Ampoule for a semiconductor manufacturing precursor2023
Semiconductor processing apparatus and a method for processing a substrate2022