Mask wear-out assessment system

Assignee

• Koniniklijke Philips N.V.

Inventors

• Mareike Klee (78 patents)
• Nocolaas Petrus Willard (2 patents)
• Joyce Van Zanten (16 patents)
• Lutz Christian GERHARDT (22 patents)
• Jacob Roger Haartsen (13 patents)
• CORNELIS BERNARDUS ALOYSIUS WOUTERS (2 patents)
• Jan Henrik Poesse (1 patents)

View full patent text on Google Patents →