Patent Leaderboard
USPTO Patent Rankings Data through Dec 31, 2025
Home › Multi-beam electron characterization tool with telecentric illumination

Multi-beam electron characterization tool with telecentric illumination

US Patent 11373838 · Granted Jun 28, 2022

Estimated economic value: $122,465,000 ⓘ

Assignee

Inventors

View full patent text on Google Patents →

More Patents by These Inventors

Auto-focus sensor implementation for multi-column microscopes2025
Valve arrangement2025
Segmented multi-channel, backside illuminated, solid state detector with a throu2023
Plasmonic photocathode emitters at ultraviolet and visible wavelengths2022
Defect inspection and review using transmissive current image of charged particl2022
Field curvature correction for multi-beam inspection systems2022
Arrayed column detector2022
Apparatus and method for correcting arrayed astigmatism in a multi-column scanni2019
Position feedback for multi-beam particle detector2019
Reduced Coulomb interactions in a multi-beam column2019
Digital pattern generator having charge drain coating2018
Light-emitting device test systems2018