Patent Leaderboard
USPTO Patent Rankings Data through Dec 31, 2025
Home › Target supply device, extreme ultraviolet light generation apparatus, and electronic device manufacturing method

Target supply device, extreme ultraviolet light generation apparatus, and electronic device manufacturing method

US Patent 11372333 · Granted Jun 28, 2022

Assignee

Inventors

View full patent text on Google Patents →

More Patents by These Inventors

Extreme ultraviolet light generation apparatus and electronic device manufacturi2025
Target supply device and electronic device manufacturing method2025
Water area monitoring device, water area monitoring system, water area monitorin2025
Target supply device, extreme ultraviolet light generation apparatus, and electr2022
Rare earth thin film magnet, process for producing same, and target for forming 2022
Rare earth thin film magnet and production method thereof2021
Rare earth thin film magnet and method for producing same2021
Target supply device, extreme ultraviolet light generating apparatus, and electr2021
Extreme ultraviolet light generation device and target supply device2021
Method of producing acrylic fiber bundle and method of producing carbon fiber bu2021
Rare earth thin-film magnet and method for producing same2020
Target supply apparatus2020