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Home › MEMS device and manufacturing method of the same

MEMS device and manufacturing method of the same

US Patent 11365117 · Granted Jun 21, 2022

Assignee

ITRI

Inventors

Heng-Chung Chang (8 patents)
Jhih-Jie Huang (8 patents)
Chih-Ya Tsai (3 patents)
Jing-Yuan Lin (36 patents)

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