Patent Leaderboard
USPTO Patent Rankings Data through Dec 31, 2025
Home › Piezoelectric anti-stiction structure for microelectromechanical systems

Piezoelectric anti-stiction structure for microelectromechanical systems

US Patent 11365115 · Granted Jun 21, 2022

Estimated economic value: $16,322,000 ⓘ

Assignee

Inventors

View full patent text on Google Patents →

More Patents by These Inventors

Bookcase2025
Pharmaceutically acceptable acid salt of free base of GLP1 receptor agonist, and2025
Optical biosensor device with optical signal enhancement structure2025
Semiconductor device and method of manufacture2025
Biosensor system with integrated microneedle2025
Hybrid ultrasonic transducer system2025
Semiconductor device with bioFET and biometric sensors2025
Method and system for detecting semiconductor device2025
Method and system for detecting semiconductor device2025
Method and system for detecting semiconductor device2025
Piezoelectric biosensor and related method of formation2025
Differential sensing with biofet sensors2025