Patent Leaderboard
USPTO Patent Rankings Data through Dec 31, 2025
Home › Plasma reactor and heating apparatus therefor

Plasma reactor and heating apparatus therefor

US Patent 11363680 · Granted Jun 14, 2022

Assignee

Inventors

View full patent text on Google Patents →

More Patents by These Inventors

Temperature control apparatus for semiconductor processing equipment, and temper2025
Temperature control apparatus for semiconductor processing equipment, and temper2025
Temperature control apparatus for semiconductor processing equipment, and temper2025
Liquid dressing for promoting wound healing2025
Control method for multi-zone active-matrix temperature control in plasma proces2025
Control method for multi-zone active-matrix temperature control in plasma proces2025
Plasma treatment apparatus, lower electrode assembly and forming method thereof2025
Breast calcification imaging phantoms and methods of use2025
Bottom electrode assembly, plasma processing apparatus, and method of replacing 2024
Multi-zone temperature control plasma reactor2024
Plasma reactor having a variable coupling of low frequency RF power to an annula2024
Plasma reactor having a variable coupling of low frequency RF power to an annula2024