Patent Leaderboard
USPTO Patent Rankings Data through Dec 31, 2025
Home › Substrate transfer apparatus and method of measuring positional deviation of substrate

Substrate transfer apparatus and method of measuring positional deviation of substrate

US Patent 11335578 · Granted May 17, 2022

Assignee

Inventors

View full patent text on Google Patents →

More Patents by These Inventors

Video confirmation computer2025
Substrate conveying robot system2025
Substrate transfer apparatus2025
Substrate transfer apparatus2025
Substrate transfer robot and method of controlling the same2025
Robot system2025
Roots pump2025
Substrate conveying robot and substrate conveying robot system2024
Substrate conveying robot and substrate conveying robot system2024
Aligner apparatus2024
Aligner apparatus2024
Substrate mapping device, method of mapping by the device, and method of teachin2024