Assignee
- Semiconductor Manufacturing International (Shanghai)
- Semiconductor Manufacturing International (Beijing)
Inventors
- Jisong JIN (30 patents)
- Zejun He (1 patents)
- Jia NI (5 patents)
- Yanhua Wu (5 patents)
- Junling PANG (2 patents)
US Patent 11322353 · Granted May 3, 2022