Sputter target magnet

Assignee

• TSMC

Inventors

• Ming-Jie He (8 patents)
• Shawn Yang (7 patents)
• Szu-Hsien Lo (5 patents)
• Shuen-Liang Tseng (4 patents)
• Wen-Cheng Cheng (8 patents)
• Chen-Fang Chung (10 patents)
• Chia-Lin Hsueh (7 patents)
• Kuo-Pin Chuang (3 patents)

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