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Home › Micromechanical detection structure of a MEMS multi-axis gyroscope, with reduced drifts of corresponding electrical parameters

Micromechanical detection structure of a MEMS multi-axis gyroscope, with reduced drifts of corresponding electrical parameters

US Patent 11313681 · Granted Apr 26, 2022

Estimated economic value: $26,166,000 ⓘ

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