Assignee
- Semiconductor Manufacturing International (Shanghai)
- Semiconductor Manufacturing International (Beijing)
Inventors
- Feng Bai (96 patents)
- Wanjuan Zhang (3 patents)
- Yibin Huang (5 patents)
- Yao Xu (15 patents)
- Fan Zhang (737 patents)
US Patent 11307502 · Granted Apr 19, 2022