Patent Leaderboard
USPTO Patent Rankings Data through Dec 31, 2025
Home › Electrostatic chuck and processing apparatus

Electrostatic chuck and processing apparatus

US Patent 11276602 · Granted Mar 15, 2022

Assignee

Inventors

View full patent text on Google Patents →

More Patents by These Inventors

Memory system and control method2025
Memory system and method2025
Storage device and storage system2025
Power converter and control method for power converter2025
RF sputtering of multiple electrodes with optimized plasma coupling through the 2025
Information processing apparatus, information processing method, and program for2025
Resolver and electric power steering device2025
Aqueous inkjet ink and printed matter2025
Power conversion device and electric power steering device2025
Sealing device2025
Angle detection device2025
Memory system and method of controlling nonvolatile memory2025