Patent Leaderboard
USPTO Patent Rankings Data through Dec 31, 2025
Home › Imprint apparatus and article manufacturing method

Imprint apparatus and article manufacturing method

US Patent 11237487 · Granted Feb 1, 2022

Estimated economic value: $65,000 ⓘ

Assignee

Inventors

View full patent text on Google Patents →

More Patents by These Inventors

Lithography information processing apparatus, lithography system, storage medium2025
Magnification ramp scheme to mitigate template slippage2025
Magnification ramp scheme to mitigate template slippage2023
Imprint apparatus and article manufacturing method2023
Imprint apparatus, imprint method, and article manufacturing method2022
Imprint apparatus, imprint method, and article manufacturing method2022
Imprint apparatus, imprint method, and method for manufacturing article2022
Failure diagnostic apparatus for ball screw device2021
Driving device for an optical storage medium2004
Gain controlling apparatus and method, information reproducing apparatus and met2003
Drive apparatus for optical recording medium2003