MEMS element

Assignee

• Kabushiki Kaisha Toshiba

Inventors

• Fumitaka ISHIBASHI (9 patents)
• Naofumi Nakamura (56 patents)
• Hiroaki Yamazaki (83 patents)
• Tomohiro Saito (139 patents)
• Tomohiko Nagata (52 patents)
• Kei Masunishi (45 patents)
• Yoshihiko KURUI (6 patents)

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