Assignee
- Semiconductor Manufacturing International (Shanghai)
- Semiconductor Manufacturing International (Beijing)
Inventors
- Yafeng Qian (1 patents)
- Ying Li (11 patents)
- Lihua Ding (2 patents)
- Jiaxi Li (8 patents)
- Wendong LIU (25 patents)
US Patent 11189495 · Granted Nov 30, 2021