Thin film formation method

Assignee

• Ulvac
• IBM

Inventors

• Masanobu Hatanaka (21 patents)
• Yohei Ogawa (40 patents)
• Keon Chang Lee (7 patents)
• Nobuyuki Kato (64 patents)
• Takakazu Yamada (9 patents)
• John Rozen (48 patents)

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