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Home › Holding arrangement for holding a substrate, carrier including the holding arrangement, processing system employing the carrier, and method for releasing a substrate from a holding arrangement

Holding arrangement for holding a substrate, carrier including the holding arrangement, processing system employing the carrier, and method for releasing a substrate from a holding arrangement

US Patent 11186906 · Granted Nov 30, 2021

Estimated economic value: $50,552,000 ⓘ

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