Patent Leaderboard
USPTO Patent Rankings Data through Dec 31, 2025
Home › Method and apparatus for inspection and metrology

Method and apparatus for inspection and metrology

US Patent 11170072 · Granted Nov 9, 2021

Assignee

Inventors

View full patent text on Google Patents →

More Patents by These Inventors

Method for optimizing a sampling scheme and associated apparatuses2025
Metrology method, target and substrate2025
Methods and apparatus for obtaining diagnostic information relating to an indust2025
Method for controlling a semiconductor manufacturing process2025
Computational metrology2025
Method and apparatus for optimization of lithographic process2024
Method to label substrates based on process parameters2024
Methods and apparatus for measuring a property of a substrate2024
Methods and apparatus for measuring a property of a substrate2024
Methods and apparatus for obtaining diagnostic information relating to an indust2024
Method for controlling a manufacturing process and associated apparatuses2023
Methods of determining corrections for a patterning process, device manufacturin2023