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Home › Silicon chalcogenate precursors comprising a chemical formula of si(XR1)nR24-n and methods of forming the silicon chalcogenate precursors

Silicon chalcogenate precursors comprising a chemical formula of si(XR1)nR24-n and methods of forming the silicon chalcogenate precursors

US Patent 11152205 · Granted Oct 19, 2021

Estimated economic value: $15,836,000 ⓘ

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