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Home › Piezoelectric-based microactuator arrangement for mitigating out-of-plane force and phase variation of flexure vibration

Piezoelectric-based microactuator arrangement for mitigating out-of-plane force and phase variation of flexure vibration

US Patent 11152024 · Granted Oct 19, 2021

Estimated economic value: $12,857,000 ⓘ

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