Alignment mark structure and method of fabricating the same

Assignee

• United Microelectronics

Inventors

• Kun-Ju Li (35 patents)
• Jhih-Yuan Chen (3 patents)
• Hsin-Jung Liu (9 patents)
• Chau-Chung Hou (10 patents)
• Yu-Lung Shih (19 patents)
• Ang Chan (7 patents)
• Fu-Chun Hsiao (1 patents)
• Ji-Min Lin (10 patents)
• Chun-Han Chen (38 patents)

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