Etching method

Assignee

• Tokyo Electron Limited

Inventors

• Reiko SASAHARA (7 patents)
• Satoshi TODA (11 patents)
• Takuya Abe (67 patents)
• Tsuhung Huang (3 patents)
• Yoshie OZAWA (1 patents)
• Ken NAKAGOMI (2 patents)
• Kenichi Nakahata (1 patents)
• Kenshiro ASAHI (3 patents)

View full patent text on Google Patents →