Patent Leaderboard
USPTO Patent Rankings Data through Dec 31, 2025
Home › Single cell grey scatterometry overlay targets and their measurement using varying illumination parameter(s)

Single cell grey scatterometry overlay targets and their measurement using varying illumination parameter(s)

US Patent 11119417 · Granted Sep 14, 2021

Assignee

No assignee recorded.

Inventors

View full patent text on Google Patents →

More Patents by These Inventors

System and method for isolation of specific fourier pupil frequency in overlay m2025
Scanning scatterometry overlay metrology2025
Scanning scatterometry overlay metrology2025
Grating-over-grating overlay measurement with parallel color per layer2025
Massive overlay metrology sampling with multiple measurement columns2025
3D profilometry with a Linnik interferometer2025
Oscillating secondary stage for frame-mode overlay metrology2025
Scatterometry overlay metrology with orthogonal fine-pitch segmentation2025
Scanning overlay metrology with high signal to noise ratio2025
Systems and methods for measurement of misregistration and amelioration thereof2025
Systems and methods for measurement of misregistration and amelioration thereof2025
Systems and methods for correction of impact of wafer tilt on misregistration me2024