Wafer arrangement for gas sensor

Assignee

• Infineon Technologies Ag
• Fraunhofer

Inventors

• Stefan Kolb (65 patents)
• Alfons Dehe (159 patents)
• Jochen Huber (13 patents)
• Franz Jost (47 patents)
• Horst Theuss (201 patents)
• Wilhelm Wiedmeier (4 patents)
• Juergen Woellenstein (7 patents)

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